Specifications Elli-SE

Performance

• Measuring constants Film thickness, n,kvs λ
• Thickness range 1Å–10µm(depends on film type)
• Number of layers More than ten (10) Layers (Depends on film types)
• Throughput*115 ~ 20sec. per point (Depends on film types
• Repeatability*2±0.3Åon 10 times measurement
• Matrix Jones
• Dispersion relations Cauchy, Sellmeier, Tauc-Lorentz, Lorentz, Quantum-Mechanical and more
• Providing features / Refractive Index, Extinction coefficient and optical band gap / Film density and composition/ Material’s dispersion function library/ User defined models capability/ Data import & export functions/ Back-side reflection elimination/ Models for periodic structure / Extendable library / Simulation for optimization of angle of Incidence

Ellipsometer system

• Light source Tungsten halogen lamp (380 ~ 1000nm) Collimating lens system
• Spot size Standard =1.5mm
• Polarizer module Refractive optic system rotating polarizer: Stepping motor control
• Analyzer module Refractive optic system Rotatable analyzer: Stepping motor control
• Spectral graph Wavelength range : 200nm ~ 1000nm (CCD Type) Resolution : 1.5nm FWHA,
• Angle of incidence Manually variable angle of incidence55 °, 60°, 65°, 70°, 75°, 90°
• Ellipsometric angles Psi : Range, 0°~ 90°Repeatability, =±0.02°Delta : Range, 0°~ 180°with retarder Repeatability, =±0.10°
• Collimating system
• Stage 6inch (150mm Circle type)

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